A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing

1. Development

1.1. Difficult operations

1.2. Parasitic movements

1.3. Nano-Positioning

1.4. .

2. Control

2.1. Prototype system

2.2. MSL

2.3. .

3. Achievements

3.1. Millimeter workspace

3.2. Tracking error RMS (80m)

4. Design

4.1. Compact Nano-Positioner

4.1.1. range of millimeters

4.1.2. nanometric movement quality

4.2. Mirror symmetric arrangement

4.3. Appropriate redundant constraints

4.4. .

5. Model

5.1. Static

5.2. Dynamic

5.3. .

6. FEA analysis

6.1. Displacement

6.2. Pushing force

6.3. .