A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing
作者:Club Canvas Rider BMX
1. Development
1.1. Difficult operations
1.2. Parasitic movements
1.3. Nano-Positioning
1.4. .
2. Control
2.1. Prototype system
2.2. MSL
2.3. .
3. Achievements
3.1. Millimeter workspace
3.2. Tracking error RMS (80m)
4. Design
4.1. Compact Nano-Positioner
4.1.1. range of millimeters
4.1.2. nanometric movement quality